Four Point Probe
Everbeing’s four point probe uses the four co-linear probes on contact to determine the sheet resistance of your wafer or thin films. The method uses the four terminal sensing or “Kelvin” approach by using separate junctions for voltage and current instead of through the same connection. As a result, internal resistance, lead or contact resistance is reduced and lower ohm values can be read.
This four point probe stand can also be used for the following applications:
- Sheet Resistivity
- Slice Resistivity
- Doping Quality
- Metalization Thickness
- P/N Typing
- V/I Measurement
EB PCB Probe Station
All stations are set on a vibration free table. The catalogue below can be viewed for consideration. To customize your station, please contact us directly to piece together a solution that caters to your application.
Four Point Probe Head
Four co-linear probes with individual spring actuation allows good contact for probing even or uneven surfaces
SR-4
- Chuck: 8″
- Lever Driven Up/Down
- Head Up/Down: 16mm
- Probing Z Resolution: 10um
- Probe Pin Material: Tungsten Carbide
- Probe Pin Spacing: 40mil, 50mil, 62.5mil
- Probe Pin Spring: 45grams, 85grams, 180grams
- Probe Pin Diameter: 40.6um
KSR-4
- Chuck Size: ~ 12″
- Square/Round Chuck Selectable
- Z Up/Down: 30mm
- Z Resolution: 20um
- 1ea 4 Point Head
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